Auto Defect Classification (ADC) Value for Patterned Wafer Inspection Systems in PLY Within a High Volume Wafer Manufacturing Fabrication Facility

The purpose of this investigation is to demonstrate value for Auto Defect Classification (ADC) for patterned wafer inspection systems within a high volume manufacturing fabrication in the Process Limited Yield (PLY) defect area. Process excursions in all functional Unit Process (UP) areas, examples are of etch, litho, diffusion, are monitored by PLY. Troubleshooting of process excursions using added defect density count with a small percentage (random or largest 50 examples) of and inline Scanning Electron Microscope (SEM) data classification review does not give a clear indication of the full wafer data. Statistical Process Control (SPC) trigging on total counts or defect density is not as powerful as making excursion decisions on classified data from ADC (Fisher, 2002). The ADC data gives classification of the entire wafer rather than a smaller sample making signature analysis to be an additional troubleshooting tool. The inline ADC data does not have near the resolution of the SEM but can be used to help make important decisions to what is occurring in the manufacturing line. The interest is to gain a full understanding of the current capabilities and limitation of ADC and to apply the learning to enable faster reaction and visibility into process and tool excursions within a high volume manufacturing fabrication. The Technical Learning Vehicle (TLV), high running product layer at the leading design rule, there were approximately 10,000 wafers a week with 1000 wafer die (chips) per wafer. A sustained improvement in yield of 1% across the entire manufacturing line would equate to almost 1 million dollars a month of saving. With the ability to tightly control multiple etch process tools, the resulting yield improvement was 3% across 15% of the line. With the baseline yield improvement along with ability to react quickly to process excursions, the combined improvement resulted in excessive of 5 million dollar a year of reoccurring savings

Effects of the coating in single-mode slab waveguide with varying curvature:a new approach to understanding bend loss

We present analytical and numerical results that describe and quantify bend loss. Our approach is based on the coupling between fundamental and cladding modes with changing curvature in single-mode waveguides with finite cladding and absorbing coating

Bound Modes of Holey Optical Fibres

The conventional leaky mode description of so-called fundamental mode propagation along single-mode holey fibres can be explained physically in terms of a dominant bound mode, guided predominantly by the central core-hole structure, together with a number of lower-amplitude cladding-like bound modes

Bound modes of holey slab waveguides

The conventional leaky mode description of so-called fundamental mode propagation along single-mode holey fibers can be explained physically in terms of a dominant bound mode, guided predominantly by the central core-hole structure, together with a number of lower-amplitude cladding-like bound modes. A simple slab model is used to demonstrate the concept

Suppression of Cladding-mode Coupling in Single-mode Slab Waveguides of Varying Curvature

Bend loss can be quantified by following coupling between fundamental and cladding modes with changing curvature on a finite cladding, single-mode slab waveguide. A delineation criterion provides a boundary between approximately adiabatic and non-adiabatic bent waveguides

Bending effects in finite-cladding single-mode slab waveguides

A new approach to the physical description and quantification of bend loss in arbitrarily bent single-mode fibers is based on the coupling of the fundamental mode to cladding modes solely due to curvature change along the fiber. Using a slab model, it i

Discrete wavelength generation using modal interference in a diode-laser-pumped Tm3+ -doped few-mode fibre

By employing a few-mode core fibre in a symmetric cladding-pumped fibre laser arrangement, intermodal interference occurs between the first two symmetric modes that are excited simultaneously. In free-running mode, without the placement of dielectric mirrors, the Tm3+-doped silica fibre laser oscillates on a number of fringes simultaneously. In a grating-tuned arrangement, the tuning curves comprise of a number of discrete fringes consistent with the theory associated with interference between the two excited symmetric modes propagating the length of the fibre. Crow

Discrete wavelength generation using modal interference in a diode-laser-pumped Tm³⁺-doped few-mode fibre

By employing a few-mode core fibre in a symmetric cladding-pumped fibre laser arrangement, intermodal interference occurs between the first two symmetric modes that are excited simultaneously. In free-running mode, without the placement of dielectric mirrors, the Tm³⁺-doped silica fibre laser oscillates on a number of fringes simultaneously. In a grating-tuned arrangement, the tuning curves comprise of a number of discrete fringes consistent with the theory associated with interference between the two excited symmetric modes propagating the length of the fibre.4 page(s